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The Germans shot out of the blocks and played their best first half in more than a decade with 16 efforts towards goal, Joshua Kimmich opening their account with a 30th minute penalty.
They then caught Italian keeper Gianluigi Donnarumma and the entire defence napping with a quickly taken Joshua Kimmich corner for unmarked Jamal Musiala to slot in their second in the 36th minute.
Tim Kleindienst added a third on the stroke of halftime.
Germans' mistake launched Italy's comeback and allowed Moise Kean to cut the deficit four minutes after the restart. With the Germans a shadow of their earlier selves, Kean then beat defender Jonathan Tah in the 69th to make it 3-2.
Italy drew on the night with Giacomo Raspadori's stoppage-time penalty but could not find another goal to level the tie on aggregate as Germany prepare to face Portugal in the last four in June.
